Methods of using adaptive sampling techniques based upon categorization of process variations, and a system for performing same are disclosed. In one illustrative embodiment, the method comprises acquiring metrology data regarding at least one process operation performed on a plurality of substrates...http://www.google.com.tw/patents/US6859746?utm_source=gb-gplus-share專利 US6859746 - Methods of using adaptive sampling techniques based upon categorization of process variations, and system for performing same
