A defect review system includes a stage, a light source, a turning mirror, and a ring of collectors. The stage supports and moves an article for inspection, the article having a surface. The light source provides light. The turning mirror turns the light toward the surface at an oblique incident angle...http://www.google.com.tw/patents/US20050094136?utm_source=gb-gplus-share專利 US20050094136 - Defect review system and method
