Pressure-compensated transducers and accelerometers, and force-sensing and acceleration-sensing methods are described. In a preferred embodiment, regression techniques are utilized in the context of a vibrating beam force transducer to provide a measure of acceleration which is both temperature-compensated...http://www.google.com.tw/patents/US6230565?utm_source=gb-gplus-share專利 US6230565 - Pressure-compensated transducers, pressure-compensated accelerometers, force-sensing methods, and acceleration-sensing methods