A plurality of buried conductors and/or buried plate patterns formed within a monocrystalline substrate is disclosed. A plurality of empty-spaced buried patterns are formed by drilling holes in the monocrystalline substrate and annealing the monocrystalline substrate to form empty-spaced patterns of...http://www.google.com.tw/patents/US6383924?utm_source=gb-gplus-share專利 US6383924 - Method of forming buried conductor patterns by surface transformation of empty spaces in solid state materials
