In an ellipsometric apparatus, a laser is provided for generating a probe beam. The probe beam is passed through a polarization section to give the beam a known polarization state. The probe beam is then tightly focused with a high numerical aperture lens onto the surface of the sample. The polarization...http://www.google.com.tw/patents/US5042951?utm_source=gb-gplus-share專利 US5042951 - High resolution ellipsometric apparatus
