Methods of making MEMS devices including interferometric modulators involve depositing various layers, including stationary layers, movable layers and sacrificial layers, on a substrate. Voids are formed in one or more of the various layers so as to form a non-planar surface on the movable and/or the...http://www.google.com.tw/patents/US7527996?utm_source=gb-gplus-share專利 US7527996 - Non-planar surface structures and process for microelectromechanical systems
