A porous film 64 is used to thermally insulate sensing integrated circuitry 44 from pixels 34 of an uncooled IR detector hybrid system 30. The porous film 64 is preferably a silicon-dioxide xerogel. A protective film 65 may be deposited on the porous film 64....http://www.google.com.tw/patents/US5627082?utm_source=gb-gplus-share專利 US5627082 - High thermal resistance backfill material for hybrid UFPA's
