The invention features a surface profiling method including: collecting interferometric data related to a surface profile of a measurement object; and calculating the surface profile based on the collected interferometric data and at least one value indicative of dispersion in the phase change on reflection...http://www.google.com.tw/patents/US6597460?utm_source=gb-gplus-share專利 US6597460 - Height scanning interferometer for determining the absolute position and surface profile of an object with respect to a datum
