A pressure sensor of the present invention comprises a diaphragm 6 having a first surface which receives pressure and a thermal detecting portion 3 with a heat sensitive portion disposed as to oppose the diaphragm through a spacer, wherein displacement values of the diaphragm owing to variations in pressure...http://www.google.com.tw/patents/US6393919?utm_source=gb-gplus-share專利 US6393919 - Pressure sensor with a thermal pressure detecting element
