A dense cleaning fluid for removing contaminants from a substrate and a method comprising same is disclosed herein. In one embodiment of the present invention, the dense cleaning fluid comprises a dense fluid and at least one acetylenic diol or acetylenic alcohol surfactant....http://www.google.com.tw/patents/US7211553?utm_source=gb-gplus-share專利 US7211553 - Processing of substrates with dense fluids comprising acetylenic diols and/or alcohols
