An inspection method using an electron beam. Emitted charged particles from an electron gun located inside a primary column are accelerated to form a primary beam. A cross section of the primary beam is shaped a desired shape by a primary optical system located inside the primary column. A trajectory...http://www.google.com.tw/patents/US6781123?utm_source=gb-gplus-share專利 US6781123 - Charged particle beam control element, method of fabricating charged particle beam control element, and charged particle beam apparatus
