The present invention relates to a method for manufacturing a micromechanical component (100), that has at least one hollow space (110) and a functional element (12) that is provided at least partially in the hollow space (110) and/or a functional layer (13a, 13b, 13c) that is provided at least partially...http://www.google.com.tw/patents/US20030141561?utm_source=gb-gplus-share專利 US20030141561 - Method for producing a micromechanical component, and a component produced according to said method
