Systems and methods for providing illumination of a specimen for inspection are provided. One system includes one or more first optical elements configured to illuminate a diffuser with a predetermined pattern of coherent light. The system also includes one or more second optical elements configured...http://www.google.com.tw/patents/US20070052953?utm_source=gb-gplus-share專利 US20070052953 - Systems and methods for providing illumination of a specimen for inspection
