The present invention is directed to a structure comprising a substrate having a surface; a plurality of elongated electrical conductors extending away from the surface; each of said elongated electrical conductors having a first end affixed to the surface and a second end projecting away from the surface;...http://www.google.com.tw/patents/US6528984?utm_source=gb-gplus-share專利 US6528984 - Integrated compliant probe for wafer level test and burn-in
