A fixed abrasive finishing element having a continuous phase of synthetic resin and discrete synthetic resin particles dispersed in the continuous phase of synthetic resin is described. The synthetic resin particles have abrasive particles dispersed therein. A compatibilizing agent can be used to enhance...http://www.google.com.tw/patents/US6390890?utm_source=gb-gplus-share專利 US6390890 - Finishing semiconductor wafers with a fixed abrasive finishing element
