A three dimensional inspection system for inspecting ball array devices having a plurality of balls, where the ball array device is positioned in an optical system. An illuminator is located to illuminate at least one ball on the ball array device. A first optical element is positioned to transmit light...http://www.google.com.tw/patents/US6915006?utm_source=gb-gplus-share專利 US6915006 - Method and apparatus for three dimensional inspection of electronic components
