Analysis of plasma data indicative of gaseous species therein, such as Optical Emission Spectroscopy (OES) data, is aided through the interactive use of a computer. OES data may be calibrated by the computer with minimal input from the user regarding a gas the user knows or suspects is present. The computer...http://www.google.com.tw/patents/US5546322?utm_source=gb-gplus-share專利 US5546322 - Method and system for analyzing plasma data