A method for managing data in a semiconductor processing environment. Raw data is collected during a process. Also, trace file data and process log file data are received. The raw data is synchronized with the trace file data and process log file data to create wafer data summary data is calculated from...http://www.google.com.tw/patents/US20050165731?utm_source=gb-gplus-share專利 US20050165731 - Method for processing data based on the data context
Method for processing data based on the data context