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US007715080B2
United States Patent
Natarajan et al.
(io) Patent No.: (45) Date of Patent:
US 7,715,080 B2 May 11, 2010
PACKAGING A MEMS DEVICE USING A
FRAME
Inventors: Bangalore R. Natarajan, Cupertino, CA
(US); Lauren Palmateer, San Francisco,
CA(US)
Assignee: QUALCOMM MEMS Technologies,
Inc., San Diego, CA (US)
Notice: Subject to any disclaimer, the term of this patent is extended or adjusted under 35 U.S.C. 154(b) by 62 days.
Appl.No.: 11/735,362
Filed: Apr. 13, 2007
Prior Publication Data
US 2007/0242345 Al Oct. 18, 2007
Related U.S. Application Data
Provisional application No. 60/791,730, filed on Apr. 13, 2006.
Int. CI.
G02F1/03 (2006.01)
G02B 26/00 (2006.01)
U.S. CI 359/245; 359/290
Field of Classification Search 359/245,
359/290
See application file for complete search history.
References Cited
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